5 Axis with Pneumatics Precision Embedded Mechatronics Sub-system

Mechatronic concept to series production of non-LTI thermal stability flow control and mixing embedded system over wide vacuum range with optimized ramp and settle times to support end user operational efficiency for #1 global Tier 1 $Multibillion mechatronic vacuum $multimillion capital system provider.

System Parameters:

  • Closed loop coordinated control of 14 discrete thermal elements (12 heated with passive cooling and two Peltier thermoelectric heating/cooling) with 1/10 1º C from single to triple digit mTorr for fine precision control of gas dosing
  • Proprietary 3-axis coordinated µm accuracy PWM motion control with custom mechanics from hardened cams to motors and micro flow needle
    • Selection and development of common computing core for first SCU controlled subsystem and all future subsystems for the customer’s next generation mechatronic vacuum tools
    • Proprietary CANOpen over Ethernet to host with Spy protocol to subsystems
    • Precision machined, tapered interlocking, heat treated steel components conforming to mechanical and vacuum contamination control specifications

Values Delivered:

  • Product lifecycle management from mechatronic feature set, production, integration, test and maintenance of vacuum sub-system that allows for new science
  • Selection and development of common computing core for first SCU controlled subsystem and all future subsystems for the customer’s suite of next generation mechatronic vacuum tools
  • Patent concept, authorship and filing

Expertise Provided:

  • Research and development of mechatronic vacuum sub-system and higher level system firmware strategy and development
  • Micro-positioning and thermally managed chemistry mixing, deposition and etching from mechanics to control
  • Traceability, fabrication, integration and qualification of complete BOM of components and sub-systems with vacuum contamination control